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Sputtering of thin conductive layers
Sloboda, Alexander ; Vaněk, Jiří (referee) ; Zatloukal, Miroslav (advisor)
This bachelor’s thesis is focused on the issues of thin films, especially thin transparent conductive films, and their deposition on substrate surface. Methods of deposition, their pros and cons, construction of the NP12 sputtering device, fundamentals of a deposition of thin conductive films, using reactive magnetron sputtering, preparation of substrates before deposition and thermal processing of substrates after deposition are issues that are described in this thesis. Instruction manual for magnetron sputtering device NP12 was created. For the purpose of this thesis several samples were prepared by magnetron sputtering device NP12 with different process parameters. These experimentally created samples were evaluated with the help of XRD measurement, to determine the influence of annealing in a vacuum oven on a crystal lattice. Substrates were also analysed by scanning electron microscope to evaluate presence of chemical elements inside the thin films.
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Sputtering of thin conductive layers
Sloboda, Alexander ; Vaněk, Jiří (referee) ; Zatloukal, Miroslav (advisor)
This bachelor’s thesis is focused on the issues of thin films, especially thin transparent conductive films, and their deposition on substrate surface. Methods of deposition, their pros and cons, construction of the NP12 sputtering device, fundamentals of a deposition of thin conductive films, using reactive magnetron sputtering, preparation of substrates before deposition and thermal processing of substrates after deposition are issues that are described in this thesis. Instruction manual for magnetron sputtering device NP12 was created. For the purpose of this thesis several samples were prepared by magnetron sputtering device NP12 with different process parameters. These experimentally created samples were evaluated with the help of XRD measurement, to determine the influence of annealing in a vacuum oven on a crystal lattice. Substrates were also analysed by scanning electron microscope to evaluate presence of chemical elements inside the thin films.
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